Long-term changes in Al thin-film extreme ultraviolet filters

Long-term changes in Al thin-film extreme ultraviolet filters

Skinny-film Al filters are very fashionable owing to their excessive transmittance within the wavelength vary of 17-67 nm and low transmittance within the seen and near-UV areas; nonetheless, they’re susceptible to oxidation. The amorphous¬†Al2O3¬†layers on the Al surfaces have a lot smaller transmittance than the majority Al materials; due to this fact, they strongly affect…

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